Small slit coater for R&D.
Compatible with low to high viscosity, 1 to 10,000 cps. Resist, polyimide, protective film, curing resin agent. Substrate size: 400 × 500 mm.
<Precision Slit Coater> - Conveyance Drive: Linear Motor, Linear Guide, Servo Motor - Coating Supply Method: Syringe Pump (proprietary in-house development) - Precision Stage: Granite Base (Flatness: 10μm or less) - Compatible with low to high viscosity (a few cps to 10,000 cps) Organic EL, Photoresist, Polyimide, Ink Materials, Curing Resins, etc.
- Company：ネクス
- Price：Other
